The Waferstepper Challenge: Innovation and Reliability despite Complexity

abstract The function of the waferstepper is explained and its most important characteristics. The dynamic market provides continuous technological challenges, resulting in ever increasing performance, but also complexity. Despite the exponential increase of performance and complexity, the reliability must be good. The reliability is crucial when the stepper is used in volume production.

The ASML engineering style plays a central role in tackling this challenge. Three key aspects of this style are: Feedback, Focus and Future awareness. The concurrent application of these three aspects has so far been proven to be effective.

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